EUV Sources for Lithography Download

Author: Vivek Bakshi (Editor)
Edition:
Binding: Hardcover
ISBN: 0819458457

EUV Sources for Lithography (SPIE Press Monograph Vol. PM149)

This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. Get EUV Sources for Lithography computer books for free.
The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPPs) and laser-produced plasmas (LPPs), to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. Check EUV Sources for Lithography our best computer books for 2013. All books are available in pdf format and downloadable from rapidshare, 4shared, and mediafire.