Handbook of VLSI Microlithography, 2nd Edition

Author: John N. Helbert
Edition: 2
Binding: Hardcover
ISBN: 0815514441

Handbook of VLSI Microlithography, 2nd Edition, Second Edition

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsAincluding optical lithography, electron beam, ion beam, and x-ray lithography. Get Handbook of VLSI Microlithography, 2nd Edition computer books for free.
The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description Check Handbook of VLSI Microlithography, 2nd Edition our best computer books for 2013. All books are available in pdf format and downloadable from rapidshare, 4shared, and mediafire.

Handbook of VLSI Microlithography, 2nd Edition Download

The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry The book's explanation of resist and resist process equipment technology may well be the first practical description

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